期刊
SURFACE & COATINGS TECHNOLOGY
卷 200, 期 1-4, 页码 850-854出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2005.03.002
关键词
N-2/Ar mixtures; ECR plasma; plasma parameters; upper hybrid resonance
Characteristics of plasma parameters in N-2/Ar ECR plasma are investigated experimentally and numerically. Especially we focused on the characteristics of some plasma parameters from the viewpoint of high-efficiency production of atomic nitrogen N. As a result, it was found experimentally that the electron temperature increased locally in the downstream region within limited conditions of pressure, magnetic field and mixture ratio. In addition, one-dimensional fluid simulation was carried out successfully and indicated that N-2(+) can have a unique axial distribution corresponding to the experimental conditions. (c) 2005 Published by Elsevier B.V.
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