期刊
APPLIED SURFACE SCIENCE
卷 252, 期 2, 页码 296-302出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.apsusc.2004.11.091
关键词
diamond like carbon [X]; AFM [B]; Raman spectroscopy [B]; IR spectroscopy [B]; graphite [D]
Attempt has been made to deposit diamond like carbon (DLC) films from ethanol through electrodeposition at low voltages (80-300 V) at 1 mm interelectrode separation. The films were characterized by atomic force microscopy (AFM), Scanning electron microscopy (SEM), Raman spectroscopy, Fourier transform infrared (FTIR) spectroscopy and Auger electron Spectroscopy (AES). AFM investigations revealed the grain sizes are of tens of nanometers. The films were found to be continuous, smooth and close packed. Presence of peaks at 2958, 2929 and 2869 cm(-1) in FTIR spectrum indicates the bonding states to be of predominantly sp(3) type (C-H). Raman spectroscopy analysis revealed two broad bands at similar to 1350 and similar to 1570 cm(-1). The downshift of the G-band of graphite is indicative of presence of DLC. Analysis of the Raman spectra for the samples revealed an improvement in the film quality with increase in the voltage. Micro Raman investigations indicate the formation of diamond phase at the deposition potential of 80 V The sp(2) contents the films calculated from Auger electron spectra were calculated and were found to be 31, 19 and 7.8% for the samples prepared at 80, 150 and 300 V, respectively. A tentative mechanism for the formation of DLC has been proposed. These results indicate the possibility of deposition of DLC at low voltage. (c) 2005 Published by Elsevier B.V.
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