期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 52, 期 11, 页码 2365-2373出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2005.857172
关键词
diffraction; metal-semiconductor-metal (MSM) devices; optoelectronic devices; photodetectors; plasmons; semiconductor-metal interfaces; surface plasmon (SP); surface waves
An extended surface impedance boundary condition algorithm is developed that allows for the optical properties of a wide variety of complex one-dimensional periodic grating structures to be modeled. Wood-Rayleigh anomalies, diffraction, and electromagnetic resonance modes including horizontally oriented surface plasmons and vertical surface resonances are identified and described as well as analyzing their structural and geometrical dependencies. Methods to combine these modes to produce hybrid modes that channel and localize light are described. Application of these modes to metal-semiconductor-metal photodetectors (MSM-PD) is discussed and an example silicon-based MSM-PD with over 30 GHz bandwidth and 0.3 A/W responsivity is described.
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