X-ray microanalysis of real materials using Monte Carlo simulations

In this paper, new results of Monte Carlo simulations are presented in the context of X-ray microanalysis in the scanning electron microscope and the variable pressure scanning electron microscope. For the analysis of bulk samples in the scanning electron microscope, the simulation of X rays emitted from porous materials is covered. Modeling of electron scattering in gases is also presented in the context of X-ray microanalysis in variable pressure scanning electron microscopy. Finally, characterization of electron trajectories from the results of Monte Carlo simulations using the concepts of fractal geometry is described with their implications for quantitative X-ray microanalysis. Copyright (C) 2005 John Wiley & Sons, Ltd.