Dielectrophoresis and chemically mediated directed self-assembly of micrometer-scale three-terminal metal oxide semiconductor field-effect transistors

Micrometer-scale metal oxide semiconductor field-effect transistors (MOSFETs) self-assemble from a fluid onto a substrate, and are held in place during drying by application of a dielectrophoretic force or by interactions with a self-assembled monolayer. The assembled devices (see Figure) are fully functional. This approach might be used to assemble devices on flexible plastic or other substrates, or for 3D integration of silicon devices on chips.