期刊
IEEE PHOTONICS TECHNOLOGY LETTERS
卷 17, 期 12, 页码 2613-2615出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LPT.2005.859132
关键词
integrated optics; silicon-on-insulator technology
We present a silicon-on-insulator (SOI) waveguide to fiber coupler fabricated using 248-nm-deep ultraviolet lithography. The loss of the taper structure is around 1 dB while the coupling loss from a lensed fiber into a 590-nm-wide SOI waveguide was measured to be 1.9 dB.
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