期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 125, 期 2, 页码 382-386出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2005.08.010
关键词
piezoelectric effect; thin film; PZT; stainless steel substrate; RF-magnetron sputtering; MEMS
Piezoelectric Pb(Zr,Ti)O-3 (PZT) thin films with a composition near the morphotoropic phase boundary were deposited directly on cantilever-shaped stainless steel (SUS) substrates using RF-magnetron sputtering for application of micro-electromechanical systems (MEMS). X-ray diffraction measurements reveal that the PZT thin films have a polycrystalline perovskite structure with a preferential orientation of (101). Cross-section morphology - observed using a scanning electron microscope - indicates that the PZT films exhibit a dense columnar structure without pores or clacks. The films' P-E hysteresis loops indicate clear ferroelectricity. Based on the deflection characteristics of the cantilever, the effective piezoelectric coefficient e(31) of the PZT films is measured to be -1.35 C/m(2). (c) 2005 Elsevier B.V. All rights reserved.
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