4.7 Article

Ruthenium oxide cryogenic temperature sensors

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SENSORS AND ACTUATORS A-PHYSICAL
卷 125, 期 2, 页码 358-362

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ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2005.08.008

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resistance thermometry; cryogenics; sensors; nanopowders; ruthenium oxides; nano

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RuO2 based cryogenic temperature sensors were developed using a nanopowder approach. Ruthenium oxide nanopowders were consolidated t, process and were tested for resistivity as a function of temperature for determining into compacts Using the Plasma Pressure Compaction ((PC)-C-2 (R)) the reproducibility and stability of the sensors due to thermal stresses. The sensors showed metallic behavior and strong positive temperature coefficient of resistivity (PTCR). Resistance-temperaturc calibration demonstrated a monotonic response with a positive temperature coefficient of resistivity from 70 to 300 K along with dimensionless sensitivity (approximately 1.0) comparable to that of platinum resistance thermometers. (c) 2005 Published by Elsevier B.V.

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