Femtosecond laser microprocessing with threedimensionally isotropic spatial resolution using crossed-beam irradiation

We describe the use of a crossed-beam irradiation system in three-dimensional femtosecond laser microprocessing to obtain three-dimensionally isotropic spatial resolution. In the crossed-beam geometry, two orthogonal objective lenses are arranged to share a common focal point. The synthesized focal spot produces an isotropic illumination volume. We demonstrate that microfluidic channels with substantially circular cross-sectional shapes can be directly fabricated inside glass by using the crossed-beam irradiation system. (c) 2006 Optical Society of America.