期刊
MICROSCOPY AND MICROANALYSIS
卷 12, 期 1, 页码 65-71出版社
CAMBRIDGE UNIV PRESS
DOI: 10.1017/S1431927606060065
关键词
radiation damage; electron sputtering; aberration-corrected probe
We have investigated the changes produced in single-element and two-layer transmission electron microscope (TEM) specimens irradiated by an intense nanometer-sized electron probe, Such as that produced in a field-emission or aberration-corrected TEM. These changes include hole formation and the accumulation of material within the irradiated area. The results are discussed in terms of mechanisms, including electron-beam sputtering and surface diffusion. Strategies for minimizing the effect of the beam are considered.
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