期刊
THIN SOLID FILMS
卷 496, 期 1, 页码 117-120出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.tsf.2005.08.259
关键词
transparent conducting oxides; F-doped SnO2; spray pyrolysis coating
Large scale F-doped SnO2 coating was carried out on a glass production line by a cheap in-house spray pyrolysis coater. The coater was installed oil glass annealing lehr which has a width of similar to 2 m. The solution for film formation consisted of SnCl(4)(.)5H(2)O and NH4F dissolved in a solvent. The solution was sprayed by pressure spray nozzles downward to underneath hot glass sheet. The coating was done for 150 s where the glass temperature was in a range of 430-450 degrees C. The total length of the coated glass was similar to 10 m. It was found by sheet resistance measurement that the coating started non-uniformly and then it covered the entire width of glass when spraying time approached 150 s. The lowest sheet resistance of the coated glass was 0.8 k Omega/square where the film thickness was similar to 80 nm which corresponds to film resistivity of similar to 6.4 x 10(-3) Omega-cm. (c) 2005 Elsevier B.V. All rights reserved.
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