期刊
IEEE JOURNAL OF SOLID-STATE CIRCUITS
卷 41, 期 2, 页码 352-361出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSSC.2005.863148
关键词
capacitive readout; inertial sensors; microaccelerometers; micro-g; sigma-delta; switched capacitor
This paper reports a high-sensitivity low-noise capacitive accelerometer system with one micro-g/root Hz resolution. The accelerometer and interface electronics together operate as a second-order electromechanical sigma-delta modulator. A detailed noise analysis of electromechanical sigma-delta capacitive accelerometers with a final goal of achieving sub-jig resolution is also presented. The analysis and test results have shown that amplifier thermal and sensor charging reference voltage noises are dominant in open-loop mode of operation. For closed-loop mode of operation, mass-residual motion is the dominant noise source at low sampling frequencies. By increasing the sampling frequency, both open-loop and closed-loop overall noise can be reduced significantly. The interface circuit has more than 120 dB dynamic range and can resolve better than 10 aF. The complete module operates from a single 5-V supply and has a measured sensitivity of 960 mV/g with a noise floor of 1.08 mu g/root Hz in open-loop. This system can resolve better than 10 mu g/root Hz in closed-loop.
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