期刊
SURFACE ENGINEERING
卷 22, 期 1, 页码 35-46出版社
TAYLOR & FRANCIS LTD
DOI: 10.1179/174329406X85029
关键词
electron beam evaporation; vapour phase condensation; thick films; nanostructures; dimensional effects; mechanical properties; functional and structural coatings
The present paper describes the process of high speed electron beam evaporation of inorganic substances under vacuum and process parameters controlling the deposition, structure and properties of thick condensates (films). Considered are examples of single phase and multiphase metal, metal-ceramic, cermet and ceramic condensates of the thickness from several micrometres to several millimetres with dispersed, multilayer, porous and graded structures in a broad range of structural element dimensions. Dimensional effects in the structure and mechanical properties of thick condensates are noted. Areas of practical application of inorganic materials deposited from the vapour phase are described.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据