Fabrication of tunable nanostructure arrays using ion-polishing-assisted nanosphere lithography

A simple technique has been developed for fabricating tunable nanostructure arrays, combining ion polishing and nanosphere lithography. Nanohole arrays with the controllable shape and in-plane dimensions are demonstrated. The combination of ion polishing and nanosphere lithography yields tunable masks and provides an easy way for flexible nanofabrication. (c) 2006 American Institute of Physics.