期刊
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
卷 24, 期 2, 页码 554-561出版社
A V S AMER INST PHYSICS
DOI: 10.1116/1.2167987
关键词
-
The ability to obtain three-dimensional information has always been important to gain insight and understanding into material systems. Three-dimensional reconstruction often reveals information about the morphology and composition of a system that can otherwise be obscured or misinterpreted by two-dimensional images. In this article, we describe tomographic measurements with 10 nm scale resolution, combining focused ion-beam processing with field-emission scanning electron microscopy to obtain a series of high-resolution two-dimensional cross-sectional images. The images were then concatenated in a computer and interpolated into three-dimensional space to assess and visualize the structure of the material. The results of this research demonstrate the use of tomographic reconstruction of Si-Si/Ge and theta' Al2CU samples to reproduce the three-dimensional morphology with sub-10 nm resolution. (c) 2006 American Vacuum Society.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据