Oxidation/corrosion of polymer-derived SiAlCN ceramics in water vapor

Fully dense polymer-derived SiAlCN ceramics were exposed to pure water vapor flowing at the rate of 4.4 cm/s at 1100 degrees C. Weight changes as a function of annealing time were recorded to illustrate the oxidation/corrosion behavior of the materials. The paralinear kinetic model was used to determine the parabolic and linear rate constants from the experimental data. The results show that the polymer-derived SiAlCN ceramics have a much better water-vapor corrosion resistance than pure silicon-based ceramics.