4.7 Article Proceedings Paper

Fabrication and characterization of ZnO nanowires based UV photodiodes

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SENSORS AND ACTUATORS A-PHYSICAL
卷 127, 期 2, 页码 201-206

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ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2005.06.023

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ZnO nanowires; UV light; photodiodes

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A heterojunction of n-type zinc oxide (ZnO) nanowires and p-type silicon has been successfully constructed to demonstrate ultraviolet (UV) photodiodes. The prototype device consists of naturally doped n-type ZnO nanowites grown on top of a (100) p-silicon substrate by the bottom-up growth process. The diameter of the nanowires is in the range of 70-120 nm, and the length is controlled by the growth time. The isolation is achieved by using spin-on glass (SOG) that also works as the foundation of the top electrode. The current-voltage (I-V) characteristics show the typical rectifying behavior of heterojunctions, and the photodiode exhibits response of similar to 0.07A/W for UV light (365 nm) under a 20 V reverse bias. (c) 2005 Elsevier B.V. All rights reserved.

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