On-chip microfluidic tuning of an optical microring resonator

We describe the design, fabrication, and operation of a tunable optical filter based on a bus waveguide coupled to a microring waveguide resonator located inside a microchannel in a microfluidic chip. Liquid flowing in the microchannel constitutes the upper cladding of the waveguides. The refractive index of the liquid controls the resonance wavelengths and strength of coupling between the bus waveguide and the resonator. The refractive index is varied by on-chip mixing of two source liquids with different refractive indices. We demonstrate adjustment of the resonance by 2 nm and tuning the filter to an extinction ratio of 37 dB.