期刊
NANOTECHNOLOGY
卷 17, 期 5, 页码 1464-1469出版社
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/17/5/050
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We have developed a new hybrid AFM probe combining an SU-8 polymer body with a full tungsten cantilever having a nanometric tip. The fabrication is based on surface micromachining a silicon wafer, where tungsten is sputter deposited in oxidation sharpened moulds to yield sharp tips with radius below 20 nm. The material properties of tungsten were measured, yielding a hardness of 14 GPa, a specific resistivity of 14.8 mu Omega cm and Young's modulus of 380 GPa. Analyses of the probes show a mechanical quality factor of 90 in air, and a low contact resistance of 25 Omega on a gold sample is measured. AFM imaging is demonstrated. As a step in the development of a robust electrically conducting AFM probe, the results are very promising.
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