4.7 Article

A new SU-8 process to integrate buried waveguides and sealed microchannels for a Lab-on-a-Chip

期刊

SENSORS AND ACTUATORS B-CHEMICAL
卷 114, 期 1, 页码 542-551

出版社

ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2005.05.011

关键词

SU-8; waveguides; Lab-on-a-Chip; packaging; microfluidics; microoptics; microfabrication

向作者/读者索取更多资源

This paper shows a novel use of SU-8, a photodefinable epoxy, to monolithically integrate low cost optical sensors and microfluidic structures. The chip consists of optical connectors, multimode waveguides and sealed microfluidic channels patterned in SU8 on a silicon substrate. We describe in detail an SU-8 microfabrication process consisting of (i) four successive photolithographic steps, (ii) a bonding process and (iii) a final releasing step. The core of the waveguide is made of standard SU-8, whereas its cladding, with a lower refractive index, is achieved by diluting the SU-8 in a liquid aliphatic resin. Despite the dilution, the SU-8/aliphatic mixture is still patternable by photolithography allowing us to fabricate microchannels. The input and output optical fibres are horizontally aligned to the waveguides by their insertion in U-Grooves, and vertically aligned by the elevation of the waveguide using a lower cladding layer that allows us to lift it up to meet the centre of a standard optical fibre. Microfluidic channels with smooth vertical walls (125 mu m height and 30 mu m width) have been achieved. Microchannels are sealed by low temperature adhesive bonding of the SU-8 photopatterned thick-films at a wafer level. Liquid flows in the channels verify good sealing of the microchannels. In order to validate the interaction of these optical-fluidic microcomponents, we carried out an absorption chemical assay. The fabrication procedure described in this article is a fast, reproducible, CMOS compatible and simple way to develop optical Lab-on-a-Chip devices using standard photolithography and bonding equipment. (c) 2005 Elsevier B.V. All rights reserved.

作者

我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。

评论

主要评分

4.7
评分不足

次要评分

新颖性
-
重要性
-
科学严谨性
-
评价这篇论文

推荐

暂无数据
暂无数据