期刊
SENSORS AND ACTUATORS B-CHEMICAL
卷 114, 期 1, 页码 32-39出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2005.04.035
关键词
MEMS; nanocrystalline SMO; sol-gel; tin dioxide; hydrogen sulfide
An ultrahigh sensitive hydrogen sulfide gas sensor was developed utilizing micromachined nanocrystalline SnO2-Ag on ceramic wafer (alumina). A polymeric sol-gel process has been successfully developed in fabricating thin film SnO2-Ag nanocomposite, which shows excellent sensing characteristics upon exposure to H2S as low as 1 ppm at working temperature as low as 70 degrees C. This sensor also shows higher sensitivity to H2S under various humidity conditions, in comparing to commercialized H2S sensors as well as published data. The environmental influences on sensor's sensitivity and selectivity have been tested and discussed. The results show that the sensor has a good selectivity due to its less sensitive to common interference gases like Cl-2, HCl, SO2, C6H14, CH4, CO, C3H8, etc. (c) 2005 Elsevier B.V. All rights reserved.
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