期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 128, 期 1, 页码 140-150出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2006.01.013
关键词
silicon; fatigue; reaction-layer fatigue; resonator
Micromachined resonators are now routinely employed to evaluate the mechanical properties of structural films used in microelectromechanical systems. However, the behavior of kHz-frequency resonators is highly sensitive to temperature, humidity, and other environmental factors. Additionally, the rapid cycle accumulation rate makes it difficult to characterize fatigue lives less than similar to 1 X 10(6) cycles. This work presents a general testing methodology based on empirical measurements and numerical modeling that allows accurate stress amplitude and fatigue lifetime measurements in both air and vacuum environments. Additionally, this strategy enables the characterization of very short fatigue lives (i.e., a few hundred cycles) for structures resonating at high frequencies (similar to 40 kHz). This testing methodology can be used to generate accurate stress-life (S-N) fatigue curves for a larger range of accumulated cycles than previously possible. (c) 2006 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据