期刊
MICROELECTRONIC ENGINEERING
卷 83, 期 4-9, 页码 1698-1701出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.mee.2006.01.201
关键词
scanning probe array; life science; nanobiology; piezoresistive sensing; parallel imaging; AFM
Various 1D and 2D scanning probe arrays with integrated piezoresistive sensors have been developed in view of nanobiology and life science applications. For such applications, the experiments Deed usually to be performed under liquid conditions. The probe arrays have been fabricated by using silicon micromachining techniques and SOI wafers. For biological applications, when the cantilevers are immersed in electrically conductive buffer environments, the piezoresistive sensing elements have to be protected. For this purpose, the sensors were coated with a 50 nm thick silicon nitride film. The realized piezoresistive cantilevers had low spring constants between 0.1 and 0.5 N/m, well suited for biological applications. Parallel imaging using a 1 x 2 probe array was demonstrated by simultaneous imaging of a test sample in buffer solution. (c) 2006 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据