期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 15, 期 2, 页码 380-387出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2006.872224
关键词
inertial sensor; MEMS gyroscope; micromachined gyroscope; rate sensor
Commercialization of reliable vibratory micromachined gyroscopes for high-volume applications has proven to be extremely challenging, primarily due to the high sensitivity of the dynamical system response to fabrication and environmental variations. This paper reports a novel micromachined gyroscope with two degrees-of-freedom (DOF) sense-mode oscillator that provides inherent robustness against structural parameter variations. The 2-DOF sense-mode oscillator provides a frequency response with two resonant peaks and a flat region between the peaks, instead of a single resonance peak as in conventional gyroscopes. The device is nominally operated in the flat region of the sense-mode response curve, where the amplitude and phase of the response are insensitive to parameter fluctuations. Furthermore, the sensitivity is improved by utilizing dynamical amplification of oscillations in the 2-DOF sense-mode oscillator. Thus, improved robustness to variations in temperature, damping, and structural parameters is achieved, solely by the mechanical system design. Prototype gyroscopes were fabricated using a bulk-micromachining process, and the performance and robustness of the devices have been experimentally evaluated. With a 25 V dc bias and 3 V ac drive signal resulting in 5.8 pm drive-mode amplitude, the gyroscope exhibited a measured noise-floor of 0.64 degrees/s/root Hz over 50 Hz bandwidth in atmospheric pressure. The sense-mode response in the flat operating region was also experimentally demonstrated to be inherently insensitive to pressure, temperature, and dc bias variations.
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