期刊
JOURNAL OF ELECTRONIC MATERIALS
卷 35, 期 4, 页码 738-743出版社
SPRINGER
DOI: 10.1007/s11664-006-0131-z
关键词
nanowires; InN; GaN
The transport properties of single GaN and InN nanowires grown by thermal catalytic chemical vapor deposition were measured as a function of temperature, annealing condition (for GaN) and length/square of radius ratio (for InN). The as-grown GaN nanowires were insulating and exhibited n-type conductivity (n similar to 2 X 10(17) cm(-3), mobility of 30 cm(2)/V s) after annealing at 700 degrees C. A simple fabrication process for GaN nanowire field-effect transistors on Si substrates was employed to measure the temperature dependence of resistance. The transport was dominated by tunneling in these annealed nanowires. InN nanowires showed resistivity on the order of 4 X 10(-4) Omega cm and the specific contact resistivity for unalloyed Pd/Ti/Pt/Au ohmic contacts was near 1.09 X 10(-7) Omega cm(2). For In N nanowires with diameters < 100 nm, the total resistance did not increase linearly with. length/square of radius ratio but decreased exponentially, presumably due to more pronounced surface effect. The temperature dependence of resistance showed a positive temperature coefficient and a functional form characteristic of metallic conduction in the InN nanowires.
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