期刊
出版社
SPIE-SOC PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
DOI: 10.1117/1.2200674
关键词
biological micro-electro-mechanical systems; cell transport; microchannel; microfluidics; SU8 (TM)
We focus on the development and fabrication of SU8(TM)-based microchannel networks, which can be integrated into microdevices for fast drug delivery and cell transport on chips. Instead of using sacrificial materials or wafer bonding, a new simplified fabrication method is developed. Single- and double-layered SU8 TM channels on silicon substrates are successfully achieved by using this new method, as well as integration of these SU8 channels with microelectrode arrays. A series of cell transport experiments is also successfully performed on these devices. This new fabrication approach and the resulting cell transport experiments are discussed in detail. (C) 2006 Society of Photo-Optical Instrumentation Engineers.
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