期刊
MICROSCOPY AND MICROANALYSIS
卷 12, 期 2, 页码 170-177出版社
CAMBRIDGE UNIV PRESS
DOI: 10.1017/S1431927606060028
关键词
dense height map; dynamic programming; fast cross correlation; program; 3D surface topography in SEM
Scanning electron microscopy (SEM) is widely used in the science of materials and different parameters were developed to characterize the Surface roughness. In a previous work, we studied the surface topography with fractal dimension at low scale and two parameters at high scale by using the variogram, that is, variance vs. step log-log graph, of a SEM image. Those studies were carried out with the FERImage program, previously developed by us. To veri, the previously accepted hypothesis by working with only an image, it is indispensable to have reliable three-dimensional (3D) surface data. In this work, a new program (EZEImage) to characterize 3D surface topography in SEM has been developed. It uses fist cross correlation and dynamic programming to obtain reliable dense height maps in a few seconds which can be displayed as an image where each gray level represents a height value. This image can be used for the FERImage program or any other software to obtain surface topography characteristics. EZEImage also generates anaglyph images as well as characterizes 3D surface topography by means of a parameter set to describe amplitude properties and three functional indices for characterizing bearing and fluid properties.
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