Detection of residual stresses in Pb(Zr0.53Ti0.47)O3 thin films prepared on LaNiO3 buffered metal substrates with Raman spectroscopy

Sol-gel derived Pb(Zr0.53Ti0.47)O-3 (PZT) thin films have been prepared on LaNiO3 buffered Si, Ti, NiCr, and stainless steel. Raman scattering was carried out on both PZT thin films and powders. Compared with PZT powders, notable shifts of Raman modes to the lower frequency were observed in the spectra of PZT thin films on metal substrates, whereas to a higher frequency for PZT on Si. The correlation between Raman shifts and thermal stresses agrees well with the Curie-Weiss law, which indicates that the Raman scattering technique provides an effective way to estimate the magnitude and types of residual stresses in the film.