High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications

Micromachined gas sensors that work at high temperatures, namely 700 degrees C or more, are necessary for some specific applications but they present a thermal cross-talk when they are integrated with other micromachined devices. In this paper we describe the fabrication steps and the implementation of a suspended micro-hotplate device for high temperature gas sensing applications, which presents a very low-power consumption. Simulations with the finite element model tool show that its integration with other micromachined devices is appropriate. The sensor device has been tested with BaSnO3 under oxygen and CO atmospheres. (c) 2005 Elsevier B.V. All rights reserved.