Effect of carrier gas species on ferroelectric properties of PZT/stainless-steel fabricated by CO2 laser-assisted aerosol deposition

Pb(Zr,Ti)O-3 (PZT) thick films were deposited onto stainless-steel substrates by aerosol deposition using different kinds of carrier gases and were irradiated by CO2 laser both during and after deposition, for the recovery of ferroelectricity. The ferroelectric and dielectric properties of PZT films deposited using oxygen and nitrogen gases and irradiated by CO2 laser were superior to those of films deposited using He gas and irradiated by the laser. Some kinds of defects within the film were relaxed by CO2 laser irradiation during deposition, and grain growth in the film was promoted by post-annealing using laser irradiation.