Wurtzite ZnO/MgO superlattices were grown on Si (001) substrates at 750 degrees C with a radio-frequency reactive magnetron sputtering method. X-ray diffraction analysis revealed the superlattice to be a highly textured ZnO (001) layer and to be of high crystallinity and homogeneity in thickness. The periodic layer thickness was determined to be 1.85-17.72 nm. Room-temperature photoluminescence was detected for all the samples and showed that the blueshift varied with the well width of the ZnO layer, being consistent with the expectation of quantum-size effect. (c) 2006 American Institute of Physics.
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