期刊
JOURNAL OF UNIVERSITY OF SCIENCE AND TECHNOLOGY BEIJING
卷 13, 期 3, 页码 272-276出版社
INT JOURNAL MINERALS METALLURGY & MATERIALS, EDITORIAL DEPT
DOI: 10.1016/S1005-8850(06)60057-1
关键词
silicon carbide nitride; pulsed high-energy density plasma; chemical bonding state
Thin films of silicon carbide nitride (SiCN) were prepared on (111) oriented silicon substrates by pulsed high-energy density plasma (PHEDP). The evolution of the chemical bonding states between silicon, nitrogen and carbon was investigated as a function of discharge voltage using X-ray photoelectron spectroscopy. With an increase in discharge voltage both the C 1s and N 1s spectra shift to lower binding energy due to the formation of C-Si and N-Si bonds. The Si-C-N bonds were observed in the deconvolved C 1s and N Is spectra. The X-ray diffractometer (XRD) results show that there were no crystals in the films. The thickness of the films was approximately 1-2 gm with scanning electron microscopy (SEM).
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