We have designed and constructed a new flat-field-type slit-less soft x-ray emission spectrometer that enables high detection efficiency and high energy resolution in the energy range of 250-1000 eV. The energy resolution is optimized in the C 1s and O 1s regions, where the maximum energy resolution of 2500 (E/Delta E) is expected using a focused beam whose spot size is 5 mu m full width at half maximum in the vertical direction. A distortion of the linear profile of the focused image on the charge-coupled device (CCD) detector is successfully removed by using a cylindrical grating. This enabled us to apply a super-resolution reconstruction technique to compensate for the lack of spatial resolution of the CCD detector.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据