期刊
IEEE SENSORS JOURNAL
卷 6, 期 3, 页码 784-795出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2006.874495
关键词
acoustic detection microanalytical system; gas chromatography; gas-phase analysis; monolithic integration; pivot plate resonator; preconcentration; surface acoustic wave array (SAW)
Sandia's hand-held MicroChemLab system uses a micromachined preconcentrator, a gas chromatography channel, and a quartz surface acoustic wave array detector for sensitive/selective detection of gas-phase chemical analytes. Requisite system size, performance, power budget, and time response mandate microfabrication of the key analytical system components. In the fielded system, hybrid integration has been employed, permitting optimization of. the individual components. Recent improvements in the hybrid-integrated system, using plastic, metal, or silicon/glass manifolds, is described, as is system performance against semivolatile compounds and toxic industrial chemicals. The design and performance of a new three-dimensional micro-preconcentrator is also introduced. To further reduce system dead volume, eliminate unheated transfer lines, and simplify assembly, there is an effort to monolithically integrate the silicon PC and GC with a suitable silicon-based detector, such as a magnetically-actuated flexural plate wave sensor or a magnetically-actuated pivot plate resonator.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据