期刊
IEEE TRANSACTIONS ON PLASMA SCIENCE
卷 34, 期 3, 页码 755-766出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TPS.2006.875847
关键词
electron energy distribution function (EEDF); electron kinetics; gas discharge; nonequilibrium
Nonequilibrium effects associated with spatial and temporal nonlocality between electron energy distribution and electromagnetic field in gas discharge plasmas at low gas pressures are reviewed in this paper. Formation of nonequilibrium EEDF is discussed for capacitive and inductive radio-frequency discharges. The possibility of electron temperature control is considered for gas discharge plasmas at nonequilibrium condition.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据