Suppression of hysteresis in carbon nanotube field-effect transistors: Effect of contamination induced by device fabrication process

have statistically studied the suppression of hysteresis in carbon nanotube field-effect transistors. The effect of the device fabrication process on the hysteresis has been investigated. The results show that contamination induced by the fabrication process impedes the suppression of hysteresis in device passivation. To remove the contamination, we have introduced a cleaning process as a treatment before passivation. The effectiveness of passivation with polymethylmetacrylate has been improved by the cleaning process using H2SO4/H2O2 solution.