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Schottky barrier between 6H-SiC and graphite:: Implications for metal/SiC contact formation

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APPLIED PHYSICS LETTERS
卷 88, 期 24, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.2213928

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Using photoelectron spectroscopy we have determined the Schottky barrier between 6H-SiC(0001) and graphite layers grown by solid state graphitization. For n-type 6H-SiC(0001) we find a low Schottky barrier of phi(bn)=0.3 +/- 0.1 eV. For p-type SiC(0001) a rather large value of phi(bp)=2.7 +/- 0.1 eV was determined. It is proposed that these extreme values are likely to have an impact on the electrical behavior of metal/SiC contacts subjected to postdeposition anneals. (c) 2006 American Institute of Physics.

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