4.6 Article

Stiff subcircuit islands of diamondlike carbon for stretchable electronics

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JOURNAL OF APPLIED PHYSICS
卷 100, 期 1, 页码 -

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AMER INST PHYSICS
DOI: 10.1063/1.2210170

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Stretchable electronics on elastomeric substrates requires fragile and brittle device materials to be placed on stiff, mechanical distinct subcircuit islands. We deposited a diamondlike carbon (DLC) film at room temperature on a silicone substrate by pulsed laser ablation, and patterned the film into an array of 200x200 mu m(2) islands. When the substrate was uniaxially stretched to a strain of 25%, the islands remained adherent to the substrate and only deformed by similar to 5%, while the exposed substrate stretched by more than 30%. A row of 11 DLC islands interconnected with gold stretchable metallization maintained end-to-end electrical conduction during a mechanical cycle to 20% tensile strain. This demonstration of electrically interconnected stiff islands on silicone illustrates two important steps toward fully integrated, elastically stretchable electronics. (c) 2006 American Institute of Physics.

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