We investigated the relationship between tunnel magnetoresistance (TMR) ratio and the crystallization of CoFeB layers through annealing in magnetic tunnel junctions (MTJs) with MgO barriers that had CoFe/Ru/CoFeB synthetic ferrimagnet pinned layers with varying Ru spacer thickness (t(Ru)). The TMR ratio increased with increasing annealing temperature (T-a) and t(Ru), reaching 361% at T-a=425 degrees C, whereas the TMR ratio of the MTJs with pinned layers without Ru spacers decreased at T-a over 325 degrees C. Ruthenium spacers play an important role in forming a (001)-oriented bcc CoFeB pinned layer, resulting in a high TMR ratio through annealing at high temperatures.
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