期刊
SURFACE & COATINGS TECHNOLOGY
卷 200, 期 24, 页码 6792-6800出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.surfcoat.2005.10.022
关键词
Zr-Cu-O composites; structure; macrostress; toughness; mechanical properties; magnetron sputtering
The article reports on the effect of addition of Cu into the ZrO2 film on its structure, physical and mechanical properties. The ZrO2 and Zr-Cu-O films were reactively sputtered using a dc unbalanced magnetron from Zr (99.9) and ZrCu (90/10 at.%) targets in Ar+O-2 mixture at the substrate temperature T-s = 300, 400 and 550 degrees C and total sputtering gas pressure p(T) = 1 Pa on steel, Si(100) and glass substrates. The structure of films was characterized by an X-ray diffraction (XRD) and mechanical properties, i.e. microhardness H, effective Young's modulus E* = E/(1 - v(2)) and elastic recovery W-e, were measured using a microhardness tester; E and v are the Young's modulus and the Poisson ratio, respectively. The film brittleness was characterized by the formation of cracks during the diamond indenter impression into it. 5 girt thick ZrO2 films prepared in the oxide mode of sputtering are crystalline (m-ZrO2) and exhibit relatively (i) high hardness H approximate to 16 GPa and (ii) low ratio H-3/E-*2 approximate to 0.11 GPa. The Zr-Cu-O films with low (52 at.%) Cu content exhibit (i) crystalline structure, (ii) higher H, (iii) lower (- 1.5 GPa) macrostress cr and (iv) higher ratio H3 / E, 14 GPa. On the contrary, the Zr-Cu-O films with high (24 to 44 at.%) Cu content exhibit (i) X-ray amorphous structure, (ii) lower H approximate to 11 GPa and lower ratio H-3/E*(2) approximate to 0.075 GPa. A special attention was devoted to the investigation of cracking of Zr-Cu-O films under high (0.5 and 1 N) loads of the diamond indenter. The relations between the film cracking and properties of the film and the substrate were used to assess the toughness of the Zr-Cu-O film, It was found that the film toughness increase with increasing H-3/E*(2) ratio. It was shown that the addition of Cu to ZrO2 film can improve its toughness. (c) 2005 Elsevier B.V. All rights reserved.
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