Growth of textured MgO through e-beam evaporation and inclined substrate deposition

Long length textured MgO template on Hastelloy C276(TM)(HC) has been successfully deposited in a reel-to-reel (R2R) electron beam (e-beam) evaporation system by inclined substrate deposition (ISD). High deposition rate up to 10 nm s(-1) with exposure length of 7 cm has been realized. The MgO template showed good in-plane texture of 9.5 degrees- 11.5 degrees measured from the ( 002) phi scans. Experimental results reveal that MgO in-plane texture is formed by the preferred growth direction of [11n] parallel to substrate normal and one of the MgO {200} planes rotates to the in-flux direction. A new expression, termed the 'two-thirds relationship', between the inclination angle a and the tilted angle of the (00l) plane from the substrate normal, beta, has been summarized. YBa2Cu3O7-delta (YBCO) film deposited by pulsed laser deposition (PLD) on strontium ruthenate (SRO) buffered ISD MgO showed T-c of 91 K with transition width of 1 K. Critical current measurement indicated an I-c of 110 A cm(-1) at 77 K in self-field for 0.68 mu m YBCO film, corresponding to a J(c) of 1.6 MA cm(-2).