The authors report the design and implementation of an electrorheological (ER) fluid-actuated microfluidic pump, with programmable digital control. Our microfluidic pump has a multilayered structure fabricated on polydimethylsiloxane by soft-lithographic technique. The ER microfluidic pump exhibits good performance at high pumping frequencies and uniform liquid flow characteristics. It can be easily integrated with other microfluidic components. The programmable control also gives the device flexibility in its operations. (c) 2006 American Institute of Physics.
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