期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
卷 45, 期 33-36, 页码 L987-L990出版社
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.45.L987
关键词
metal cluster complex; ion beam; sputtering; Ir-4(CO)(12); SIMS; organic film; poly(methyl methacrylate); PMMA; polymer
Tetrairidium dodecacarbonyl, Ir-4(CO)(12), is a metal cluster complex that has a molecular weight of 1104.9. Using a metal-cluster-complex ion source, secondary ion mass spectrometry (SIMS) of poly(methyl methacrylate) (PMMA) thin films on silicon substrates was performed with a quadrupole mass spectrometer. The secondary ion intensity of PMMA bombarded with Ir-4(CO)(7)(+) ions was investigated in the beam energy ranging from 3 to 10keV at an incident angle of 45 degrees. For comparison, bombardment with oxygen ions, O-2(+), was also tested. It was confirmed that the use of Ir-4(CO)(7)(+) ions enhanced secondary ion intensity by at least one order of magnitude compared with that Of O-2(+) ions. Experimental results also showed that secondary ion intensity increased with beam energy; particularly, high-mass secondary ion intensity markedly increased.
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