Rapid mold temperature variation for assisting the micro injection of high aspect ratio micro-feature parts using induction heating technology

Hot embossing and injection molding are popular methods to duplicate micro features formed during polymer micro-fabrication of MEMS devices. However, both methods face challenges in filling the polymer melt completely into a micro-featured geometry of a high aspect ratio. In this study, electromagnetic induction heating combined with water cooling is used to achieve rapid mold surface temperature control during the micro-feature injection molding process. A CAE simulation was also developed through integration of both thermal and electromagnetic analysis modules of ANSYS, and its capability and accuracy were verified experimentally. Efficiency evaluations of induction heating and the uniformity of mold temperature control were conducted on a micro-featured mold. This mold was designed with a micro channel array of 30-50 mu m in width and 120 and 600 mu m in depth, corresponding to aspect ratios ranging from about 2.4 to 12. The accuracies of the micro channels in molded PMMA parts can be used to evaluate the effect of mold temperature on replication accuracy. It was found that rapid mold surface heating with temperature rising from 60 degrees C to between 100 degrees C and 140 degrees C by induction heating requires 2-3.5 s, while the mold temperature returns to 60 degrees C in about 70-110 s. The simulated mold surface temperature results are consistent with measured results. Achieving the same temperature variation by switching circulation coolants of different temperatures requires at least 7 min. The simulation also reveals that the electromagnetic wave can penetrate into the bottom of the micro channel and results in only about a 2 degrees C difference in temperature uniformity. For mold temperatures of 100 degrees C, 120 degrees C and 140 degrees C, the molded channel depths were 94.9 mu m, 105.4 mu m and 116.0 mu m, respectively, when the ideal channel depth was 120 mu m. When the channel depth is 600 mu m, the mold temperature must exceed 120 degrees C, so that reasonable accuracy in micro-feature replication can be achieved. Our results to date indicate that the aspect ratio for molded PMMA micro channels can be as high as 12. Efficient mold temperature