Gas-chromatographic and mass-spectrometric determination of impurity hydrocarbons in organochlorine compounds and dichlorosilane

A procedure was proposed for the gas-chromatographic determination of impurity organic compounds in high-purity dichlorosilane with a detection limit of 0.1-0.2 ppm, which allows metrological control in the production of high-purity dichlorosilane according to the current requirements of microelectronics.