期刊
MEASUREMENT
卷 39, 期 8, 页码 736-739出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.measurement.2006.03.003
关键词
magnetic probes; H-mode; E-mode; fields; RF ICP
The electric field due to a strong capacitive coupling between the induction coil and the walls of the plasma chamber is quite large despite the discharge being in the H-mode in N-2 and H-2 gases. And as such, this field will interfere with the measurement of the magnetic field thus causing a high degree of measurement error. This paper hence describes the use of a centre-tapped coiled magnetic probe for the measurement of magnetic field profiles in I-D in the low frequency RF inductively coupled plasma source. From these profiles, an independent method to determine the average electron density is also shown. (C) 2006 Elsevier Ltd. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据