期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 16, 期 10, 页码 1909-1918出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/16/10/001
关键词
-
We describe a batch fabrication process for producing encapsulated monolithic microfluidic structures. The process relies on sacrificial layers of silicon oxide to produce surface micromachined fluid channels. Bulk micromachined interconnects provide an interface between the microchannels and meso-scale fluidics. The full integration of the fabrication processing significantly increases device reproducibility and reduces long-term costs. The design and fabrication of dielectrophoresis (DEP) gating structures configured in both batch-flow and continuous-flow modes are detailed. Highly efficient microparticle preconcentration (up to similar to 100 x in 100 s) and valving (97% particle routing efficiency) are demonstrated using ac DEP and an accompanying phase separation. The low aspect-ratio fluid channels with integrated microelectrodes are well suited for mu m and sub-mu m particle manipulation with electric fields.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据