期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 77, 期 10, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.2358703
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A new technique based on electrochemical etching for the fabrication of sharp metallic tips for scanning probe microscopes is introduced. In the proposed method, a small Teflon mass is attached to the end of an immersed tungsten wire using an aluminum tape, which leads to a significant enhancement of yield rate of sharp tungsten tips with an apex size below 100 nm to over 60%. The functionality of the tungsten tips fabricated by the proposed method is verified by measuring the topography of a standard sample using a shear-force scanning probe microscope. (c) 2006 American Institute of Physics.
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