Development of high-angular-resolution microdiffraction system for reciprocal space map measurements

We have developed a new high-angular-resolution X-ray microdiffraction system for reciprocal space map (RSM) measurements on the BL13XU beam line at the SPring-8. This system uses a focused beam produced by using a zone plate combined with a narrow slit. This arrangement produces a focused beam having both a small beam size and a small angular divergence. The beam size and angular divergence are measured to be 0.5 x 1.6 mu m(2) and 100 mu rad, respectively. We demonstrate that RSMs measured with this system characterize the strain status of strain-relaxed SiGe buffer layers well.