4.7 Article Proceedings Paper

Fabrication of a two-dimensional pH image sensor using a charge transfer technique

期刊

SENSORS AND ACTUATORS B-CHEMICAL
卷 117, 期 2, 页码 509-515

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ELSEVIER SCIENCE SA
DOI: 10.1016/j.snb.2006.01.056

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OH sensor; CMOS image sensor; charge transfer technique; real-time imaging; chemical reaction

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In this paper, a pH image sensor, which is capable of measuring two-dimensional (2-D) distributions and dynamic images of various chemical reactions in real time, is presented. The novel pH imaging sensor developed in this work use a charge transfer technique and with them it is possible to form images of variations in chemical reactions. A prototype pH image sensor was successfully fabricated using complimentary metal-oxide semiconductor (CMOS) circuit process technology and was used to measure two-dimensional distributions of various chemical reactions in moving images at 30 frames/s. It is expected that this sensor can be used for novel applications such as in the medical and biochemistry fields. (c) 2006 Elsevier B.V. All rights reserved.

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